JPH01165622U - - Google Patents

Info

Publication number
JPH01165622U
JPH01165622U JP6244388U JP6244388U JPH01165622U JP H01165622 U JPH01165622 U JP H01165622U JP 6244388 U JP6244388 U JP 6244388U JP 6244388 U JP6244388 U JP 6244388U JP H01165622 U JPH01165622 U JP H01165622U
Authority
JP
Japan
Prior art keywords
substrate support
rotating
rotation
rotation axis
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6244388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720912Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988062443U priority Critical patent/JPH0720912Y2/ja
Publication of JPH01165622U publication Critical patent/JPH01165622U/ja
Application granted granted Critical
Publication of JPH0720912Y2 publication Critical patent/JPH0720912Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988062443U 1988-05-12 1988-05-12 半導体基板の回転サセプタ Expired - Lifetime JPH0720912Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988062443U JPH0720912Y2 (ja) 1988-05-12 1988-05-12 半導体基板の回転サセプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988062443U JPH0720912Y2 (ja) 1988-05-12 1988-05-12 半導体基板の回転サセプタ

Publications (2)

Publication Number Publication Date
JPH01165622U true JPH01165622U (en]) 1989-11-20
JPH0720912Y2 JPH0720912Y2 (ja) 1995-05-15

Family

ID=31288052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988062443U Expired - Lifetime JPH0720912Y2 (ja) 1988-05-12 1988-05-12 半導体基板の回転サセプタ

Country Status (1)

Country Link
JP (1) JPH0720912Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7435266B2 (ja) * 2020-05-29 2024-02-21 株式会社レゾナック サセプタ、化学気相成長装置及びエピタキシャルウェハの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62266825A (ja) * 1986-05-15 1987-11-19 Fujitsu Ltd 気相成長方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62266825A (ja) * 1986-05-15 1987-11-19 Fujitsu Ltd 気相成長方法

Also Published As

Publication number Publication date
JPH0720912Y2 (ja) 1995-05-15

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